Boron trichloride purification device

The invention discloses a boron trichloride purification device, and relates to the technical field of boron trichloride. The device comprises a raw material flow convergence channel, a boron trichloride adsorption system, a filter, a rectifying tower, a liquefier, a finished product storage mechani...

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Bibliographische Detailangaben
Hauptverfasser: HUANG JIADOU, LIU CHUAN, CAI YANNAN, ZONG LIDONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a boron trichloride purification device, and relates to the technical field of boron trichloride. The device comprises a raw material flow convergence channel, a boron trichloride adsorption system, a filter, a rectifying tower, a liquefier, a finished product storage mechanism, a recovery storage mechanism, a recovery filling mechanism, a finished product filling mechanism, a tail gas removal system, a hot nitrogen access port and a non-condensable steam discharge mechanism. Through cooperation of all accessories, boron trichloride can be well purified, high-purity boron trichloride is obtained, unqualified boron trichloride can be automatically recycled, the production cost is reduced, one-time forming is achieved in the purification process, continuity of the purification technology is guaranteed, boron trichloride is prevented from being affected by external impurities, the purity of boron trichloride is guaranteed, and the method is easy to operate, high in efficiency and suitable