THERMAL EMITTER WITH EMBEDDED HEATING ELEMENT

The invention generally relates to a thermal emitter with an embedded heating element. A thermal emitter (1) comprises a freestanding membrane (2) supported by a substrate (3), wherein the freestanding membrane (2) comprises in a lateral extension a center section (2-1), a conductive intermediate section (2-2) and a border section (2-3), wherein the conductive intermediate section (2-2) laterally surrounds the center section (2-1) and is electrically isolated from the center section (2-1), the conductive intermediate section (2-2) comprising a conductive semiconductor material which is encapsulated in an insulating material, and wherein the border section (2-3) at least partially surrounds the intermediate section (2-2) and is electrically isolated from the conductive intermediate section (2-2), wherein a perforation (4) is formed through the border section (2-3). 本公开总体上涉及具有嵌入式加热元件的热发射器。热发射器(1)包括由基底(3)支撑的独立膜(2)，其中独立膜(2)在横向延伸中包括中心区段(2-1)、传导中间区段(2-2)和边界区段(2-3)，其中传导中间区段(2-2)横向地围绕中心区段(2-1)并且与中心区段(2-1)电隔离，传导中间区段(2