TURBO-MOLECULAR PUMP AND STATOR THEREOF

The invention provides a turbo-molecular pump and a stator of the turbo-molecular pump, which can restrain exhaust performance reduction caused by reverse flow of gas molecules. The turbo-molecular pump comprises: multiple stages of rotor blades formed with multiple blades and provided in a pump axial direction; and multiple stages of stator blades (30) provided with multiple blades (301), the multiple stages of the rotor blades and the multiple stages of the stator blades being alternately arranged in the pump axial direction. Each stage of the stator blade (30) includes multiple divided stator blades (30a, 30b), and a clearance (305) is formed at a portion where the multiple divided stator blades (30a, 30b) face each other, and circumferential phases of the clearances (305) of adjacent ones of the stages of the stator blades (30) in the pump axial direction are shifted from each other. 本发明提供一种可抑制由气体分子逆流引起的排气性能下降的涡轮分子泵及涡轮分子泵的定子。涡轮分子泵包括：多段的转子翼，形成有多个叶片，并设置于泵轴向上；以及多段的定子翼(30)，相对于多段的转子翼在泵轴向上交替地配置，并设置有多个叶片(301)，各段