DILUTE CHEMICAL SOLUTION PRODUCTION DEVICE

A dilute chemical solution production device 1 that has a plunger pump and a chemical solution supply pipe 3 that supply a chemical solution S from a chemical solution storage tank. The terminus of the chemical solution supply pipe 3 is an injection point 11 for the chemical solution S. The chemical...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OGAWA YUICHI, SUGITA WATARU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A dilute chemical solution production device 1 that has a plunger pump and a chemical solution supply pipe 3 that supply a chemical solution S from a chemical solution storage tank. The terminus of the chemical solution supply pipe 3 is an injection point 11 for the chemical solution S. The chemical solution supply pipe 3 is inserted into first piping that is an ultrapure water passage 12 to approximately the center thereof in the radial direction via a bore-through joint 13. A conductivity meter 14 is provided as a conductivity measurement means downstream of the bore-through joint 13, which is the injection point 11, and is connected to a control means (not shown), and the plunger pump 4 can be controlled in accordance with measured values from the conductivity meter 14. This dilute chemical solution production device makes it possible to stably produce a dilute chemical solution that has an extremely low concentration of acid/base or the like by means of a simple structure. 稀药液制造装置(1)具有从药液储槽供给药液(S)的柱塞泵以及药液