Method, device and system for decomposing layout of semiconductor structure and storage medium

The invention provides a method, a device and a system for decomposing the layout of a semiconductor structure and a storage medium. The method comprises the following steps: forming a to-be-decomposed structural layout original graph based on the layout of a semiconductor structure at a preset sect...

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1. Verfasser: ZHENG XIANYI
Format: Patent
Sprache:chi ; eng
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