Method, device and system for decomposing layout of semiconductor structure and storage medium

The invention provides a method, a device and a system for decomposing the layout of a semiconductor structure and a storage medium. The method comprises the following steps: forming a to-be-decomposed structural layout original graph based on the layout of a semiconductor structure at a preset section; obtaining a plurality of sub-graphs comprising at least one part of the structural layout original graph based on the structural layout original graph; clustering the invariant moments of the plurality of sub-graphs to obtain a plurality of classes containing the invariant moments; and classifying the sub-graphs corresponding to the invariant moments in the same class into the same set so as to select feature sub-graphs from all the sub-graphs in each set. 本申请提供了一种分解半导体结构的布局的方法、装置、系统和存储介质。该方法包括：基于半导体结构在预设截面处的布局形成待分解的结构布局原图；基于结构布局原图获得多个包括结构布局原图中的至少一部分的子图；对多个所述子图的不变矩进行聚类，以获得包含不变矩的多个类；以及将同一个类中的不变矩对应的子图归至同一个集合中，以在每个集合内的全部子图中选取特征子图。