LIGHT SOURCE DEVICE FOR EXPOSURE, EXPOSURE DEVICE, AND EXPOSURE METHOD

The present invention provides a light source device for exposure that is able to synthesize light from a plurality of LED elements having different peak wavelengths, and is compactly configured, an exposure device using the light source device, and an exposure method. This light source device for exposure is provided with: a first LED array (71) having a plurality of first LED elements (72) that emit light of a first peak wavelength; a second LED array (75) having a plurality of second LED elements (76) that emit light of a second peak wavelength different from the first peak wavelength; a photosynthetic element (80) that is provided with two dichroic films (81) for transmitting light in a specific wavelength band and reflecting light in the other wavelength bands, and synthesizes light from the first and second LED arrays (71, 75); and a fly-eye lens (65) on which the light synthesized by the photosynthetic element (80) is incident. 本发明提供一种曝光用的光源装置，使用该光源装置的曝光装置以及曝光方法，其能够将具有不同的峰值波长的多个LED元件的光合成，且紧凑地构成。具备：第一LE