Jig

The invention relates to a jig which is used for a semiconductor etching machine and comprises a supporting mechanism which is used for being arranged on an outer side base of an electrostatic chuck of the semiconductor etching machine; a cleaning mechanism which is rotatably arranged on the supporting mechanism; and at least one cleaning unit which is arranged on the cleaning mechanism. The technical scheme is applied to the semiconductor etching machine, manual operation can be replaced, personnel allocation is reduced, and non-uniformity and non-balance caused by manual operation are solved; meanwhile, the problem of part damage caused by improper manual operation can also be solved, so that the part damage risk is greatly reduced, the cost increase caused by part updating is reduced, and the production cost is reduced; meanwhile, the downtime of equipment is shortened, the normal operation duration of the equipment is prolonged, and the productivity is improved. 本公开是关于一种治具，所述治具为半导体刻蚀机用治具，所述治具包括：支撑机构，用于设置在