Vacuum sensor high and low temperature working condition calibration device adopting bath oil temperature control

The invention provides a vacuum sensor high and low temperature working condition calibration device adopting bath oil temperature control. The vacuum sensor high-low temperature working condition calibration device comprises a bath oil temperature control box, a vacuum standard chamber and a standa...

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Hauptverfasser: WANG LI, GUO CHONGWU, ZHANG HAIFENG, YUAN CUIPING, DOU RENCHAO, REN GUOHUA, SHI JIJUN, ZHANG ZIGANG, CUI YUHAO, LI WENBIN, QI FEIFEI, SUN LIZHI, QI JIADONG, LIU ENJUN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a vacuum sensor high and low temperature working condition calibration device adopting bath oil temperature control. The vacuum sensor high-low temperature working condition calibration device comprises a bath oil temperature control box, a vacuum standard chamber and a standard vacuum gauge, wherein the bath oil temperature control box is connected with a first vacuum assembly and a temperature control assembly and used for installing a calibrated vacuum gauge. The probes of the calibrated vacuum gauge and the standard vacuum gauge are respectively positioned in the vacuum standard chamber; the vacuum standard chamber is connected with a second vacuum assembly and a pressure adjusting assembly. According to the technical scheme provided by the embodiment of the invention, a vacuum high and low temperature environment can be simulated in the bath oil temperature control box through the first vacuum assembly and the temperature control assembly, the calibrated vacuum gauge is ensured to