Preparation method of nitride near-infrared light-emitting diode

The invention discloses a preparation method of a nitride near-infrared light-emitting diode. The preparation method comprises the following steps of: 1, preparing an epitaxial structure layer on a sapphire substrate, the epitaxial structure layer sequentially comprising a GaN nucleating layer, a Ga...

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Hauptverfasser: CAI QIANSHUN, YANG XIAOTIAN, WANG YANJIE, LONG YUHONG, YANG FAN, LYU SA, ZHAO CHUNLEI, ZHAO YANG, GAO XIAOHONG, WU BOQI, YAN XINGZHEN, CHI YAODAN, WANG CHAO, YANG JIA, WANG HUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a preparation method of a nitride near-infrared light-emitting diode. The preparation method comprises the following steps of: 1, preparing an epitaxial structure layer on a sapphire substrate, the epitaxial structure layer sequentially comprising a GaN nucleating layer, a GaN template layer, a DBR reflecting layer, a p-type InGaN hole injection layer and an n-InN light emitting layer; 2, etching a part of the n-InN light-emitting layer on the surface of the epitaxial structure layer to obtain a plurality of electrode deposition regions, the p-type InGaN hole injection layer corresponding to the electrode deposition regions being exposed; 3, depositing a first metal electrode in the electrode deposition regions and annealing to form a p-type region electrode; 4, depositing a second metal electrode on the n-InN light-emitting layer and annealing to obtain a primary device; and 5, cleaving and packaging the primary device to obtain a discrete light emitting diode device. 本发明公开了一种氮化物近红外发光