Method and device for aligning platform by using camera and direct imaging photoetching equipment

The invention provides a method for aligning a platform by using a camera. The method comprises the steps: S101, moving a platform until an identification mark on the platform is aligned with the center of an image of a camera, and obtaining a benchmark reference position of the platform; S102, moving the platform with different movement amounts, and acquiring images of the identification mark at different positions in the view field of the camera through the camera; S103, based on the images at different positions, obtaining the pixel offset between the identification mark and the center of the image; S104, calculating first coordinates of the platform at different positions based on the benchmark reference position and the movement amount of the platform; and S105, at different positions, on the basis of the pixel offset, the first coordinate and the benchmark reference position, calculating compensation amounts of different positions in the view of the camera, and establishing a calibration alignment compe