Environment temperature compensation method, alignment device and direct-writing imaging photoetching equipment

The invention provides an environment temperature compensation method of an alignment device. The alignment device comprises a camera, a calibration ruler and a platform for fixing the calibration ruler. The environment temperature compensation method comprises the steps of S101, at an environment temperature, aligning a first identification mark on the calibration ruler with a camera view center to obtain a first position of the platform; S102, aligning a second identification mark on the calibration ruler with the center of the visual field of the camera to obtain a second position of the platform; S103, determining the distance between the first identification mark and the second identification mark according to the first position and the second position of the platform; S104, changing the environment temperature, and determining the distance between the first identification mark and the second identification mark at different environment temperatures; and S105, based on the distance between the first iden