Permeability detection equipment and detection method thereof

The invention relates to permeability detection equipment and a detection method thereof. The permeability detection equipment comprises an air inlet cavity; multiple groups of permeation cavities, which are all connected with the air inlet cavity, wherein air inlet valves are arranged between the permeation cavities and the air inlet cavity, when the air inlet valves are opened, the air inlet cavity is communicated with the corresponding permeation cavities, and first sample mounting areas are arranged in the permeation cavities; a detection cavity, wherein the plurality of groups of permeation cavities are connected with the detection cavity, accumulation valves are arranged between the permeation cavities and the detection cavity, and when the accumulation valves are opened, the detection cavity is communicated with the corresponding permeation cavities; and a mass spectrometer communicated with the detection cavity. The equipment can be used for detecting the permeability of a high-barrier-rate film, can