Thin film material as well as preparation method and application thereof

The invention provides a thin film material as well as a preparation method and application thereof, and belongs to the technical field of protective materials. The thin film material comprises a molybdenum element, a silicon element and a noble metal element, wherein the noble metal element is gold or silver, the content of the molybdenum element is 28-35at.%, the content of the silicon element is 60-70at.%, the content of the noble metal element is 0.5-1.5at.%, and the noble metal element exists in a single atom form. According to the thin film material, the noble metal Au or Ag single atom is introduced, so that the microstructure of MoSi2 can be regulated and controlled, the grain size of MoSi2 is limited, the density of a MoSi2 thin film is improved, the intrinsic brittleness of the MoSi2 thin film is improved, the toughness of the MoSi2 thin film is improved, and therefore, the hardness and the fracture toughness of the thin film material are improved. The Au single atom or the Ag single atom is introdu