Use of compositions containing bisazo compounds for detecting fissures

一种水溶性树脂组合物,其中包含有(1)水溶性树脂,(2)水溶性交联剂,(3)表面活性剂,它至少选自下列物质之一,炔属醇类,乙炔二醇类,炔属醇的乙氧基化物和乙炔二醇的乙氧基化物,以及(4)溶剂,该溶剂可以是水或一个由水与一个水溶性溶剂所组成的混合物。将该水溶性树脂组合物涂敷在光致抗蚀图案上,接着加热并通过抗蚀(剂)层提供的酸使其交联化,然后通过显影(冲洗)除去未交联化的水溶性树脂涂层,该水溶性树脂组合物具有在抗蚀图案上面的涂敷性能,而且在制作精致图案时具有优良的尺寸调节性能。因此,可以使抗蚀图案,例如沟槽图案与孔穴图案有效地得到精致。 Compositions comprising as com...

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Hauptverfasser: K.H. BECK, C. VAMVAKARIS, K-H. ETZBACH
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:一种水溶性树脂组合物,其中包含有(1)水溶性树脂,(2)水溶性交联剂,(3)表面活性剂,它至少选自下列物质之一,炔属醇类,乙炔二醇类,炔属醇的乙氧基化物和乙炔二醇的乙氧基化物,以及(4)溶剂,该溶剂可以是水或一个由水与一个水溶性溶剂所组成的混合物。将该水溶性树脂组合物涂敷在光致抗蚀图案上,接着加热并通过抗蚀(剂)层提供的酸使其交联化,然后通过显影(冲洗)除去未交联化的水溶性树脂涂层,该水溶性树脂组合物具有在抗蚀图案上面的涂敷性能,而且在制作精致图案时具有优良的尺寸调节性能。因此,可以使抗蚀图案,例如沟槽图案与孔穴图案有效地得到精致。 Compositions comprising as componentsA) at least one bisazo compound selected from the group consisting of the compounds of the general formula Ia and of the general formula Ib where R1 is C1-C8-alkyl, R2 is C2-C8-alkyl, R3 and R3' are each C2-C21-alkyl in which up to four CH2 groups of the carbon chain may be replaced by oxygen in ether function, R4 is hydrogen or is R3 (independently of R3), R4' is hydrogen or is R3' (independently of R3'),B) at least one solvent in which said component A) is soluble, and optionallyC) at least one surface-active substance,are useful as dye penetrants for detecting surface cracks or other defects in workpieces to be tested in this respect.