Method and device for detecting contamination on MEMS sensor element

The present invention relates to a method for detecting contamination of a microelectromechanical sensor element. The method includes the following steps of outputting heating control signals for controlling a heating device in order to heat the sensor element, receiving measuring signals that represent a physical variable that is measured with the aid of the heated sensor element, ascertaining, based on the measured physical variable, whether the sensor element has contamination or is free of contamination, outputting result signals that represent a result indicating whether the sensor element has contamination or is free of contamination. Moreover, a device is described. 本发明涉及一种用于探测微机电传感器元件的污物的方法，所述方法包括以下步骤：输出用于控制加热装置的加热控制信号，以便加热传感器元件；接收测量信号，所述测量信号代表借助被加热的传感器元件所测量的物理参量；基于所测量的物理参量来求取：传感器元件是具有污物还是无污物；输出结果信号，该结果信号代表结果，该结果表明传感器元件是具有污物还是无污物。本发明还涉及一种设备。