GAS LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

A gas laser device may be provided with: a chamber in which a laser gas is sealed; a window which is provided to the chamber and through which laser light is transmitted; an optical path pipe connected to the chamber by surrounding a position of the window in the chamber; a heated gas supply port through which heated purge gas is supplied into a closed space including a space in the optical path pipe; and an exhaust port through which gas in the closed space is discharged. 气体激光装置也可以具有：腔，该腔中封入激光气体；窗口，其被设置于腔，激光透过窗口；光路管，其包围腔中的设置有窗口的位置而与腔连接；加热气体供给口，其向包含光路管内的空间在内的封闭空间内供给被加热的吹扫气体；以及排气口，其排放封闭空间内的气体。