LTCC substrate as well as preparation method and application thereof

The invention discloses an LTCC substrate as well as a preparation method and application thereof. The preparation method comprises the following steps: 1) carrying out ball milling on hollow spherical SiO2 and Al2O3, and calcining to obtain SiO2@Al2O3 powder; 2) mixing KBS glass powder, the SiO2@Al...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CAO XIUHUA, CHEN TAO, TA SHIWO, FU ZHENXIAO, CUI SANCHUAN, HUANG GUOHONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention discloses an LTCC substrate as well as a preparation method and application thereof. The preparation method comprises the following steps: 1) carrying out ball milling on hollow spherical SiO2 and Al2O3, and calcining to obtain SiO2@Al2O3 powder; 2) mixing KBS glass powder, the SiO2@Al2O3 powder and an additive, and carrying out ball milling to obtain ceramic slurry; (3) forming the ceramic slurry, laminating membranes, carrying out isostatic pressing, and cutting into a ceramic blank; and 4) sintering the ceramic blank to obtain the LTCC substrate. By adding the hollow spherical SiO2, the dielectric constant of the LTCC ceramic is reduced, the dielectric constant of the material is as low as 3.5, and the dielectric loss is as low as 0.2%; and the surface of the hollow spherical SiO2 is coated with Al2O3, the surface binding force of glass and SiO2 in the sintering process is improved, the strength of the substrate is improved to 220 MPa, and the ultralow dielectric constant LTCC substrate which