VIBRATOR DEVICE

The invention provides a vibrator device which can inhibit the decrease of the oscillation characteristics. The vibrator device includes: a semiconductor substrate having a first surface and an opposite-side second surface of the semiconductor substrate from the first surface; a vibrator element provided at the first surface; a circuit element that is provided at the first surface and that includes an oscillation circuit; a wire that is provided at the first surface and that electrically couples the vibrator element and the oscillation circuit; a processing circuit that is provided at the second surface and that processes an output signal of the oscillation circuit; and a through electrode that penetrates the semiconductor substrate and that electrically couples the oscillation circuit and the processing circuit. 本发明提供振动器件，能够抑制振荡特性的下降。振动器件具有：半导体基板，其具有第1面和位于所述第1面的相反侧的第2面；振动片，其配置在所述第1面；电路元件，其配置在所述第1面，包含振荡电路；布线，其配置在所述第1面，将所述振动片和所述振荡电路电连接；处理电路，其配置在所述第2面，处理所述振荡电路的输出信号；以及贯通电极，其贯通所述半导体基板，将所述振荡电路和所述处理电路电连接。