Evaporation crucible and evaporation device
The embodiment of the invention provides an evaporation crucible and an evaporation device, and relates to the technical field of evaporation. The quality of a thin film formed by evaporation is improved. The evaporation crucible comprises a crucible body, a shielding assembly and a crucible upper c...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The embodiment of the invention provides an evaporation crucible and an evaporation device, and relates to the technical field of evaporation. The quality of a thin film formed by evaporation is improved. The evaporation crucible comprises a crucible body, a shielding assembly and a crucible upper cover. The crucible body comprises a crucible bottom wall and a crucible side wall, wherein the crucible bottom wall and the crucible side wall are used for forming a holding cavity. The shielding assembly comprises at least two baffles, wherein the at least two baffles are detachably arranged in the holding cavity. Each baffle comprises a blocking piece, each blocking piece comprises through holes, a gap is formed between the blocking pieces of the at least two baffles in the direction perpendicular to the plane where the crucible bottom wall is located, and at least one part of the through holes in the at least two baffles are not overlapped. The crucible upper cover is arranged on the crucible body in a covering |
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