Preparation method of carbon-based device and circuit structure based on bromine intercalation multilayer graphene or graphite film

The invention discloses a preparation method of a carbon-based device and a circuit structure based on a bromine intercalation multilayer graphene or graphite film, wherein the carbon-based device and the circuit structure have application prospects in the fields of low-power-consumption devices, ul...

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Bibliographische Detailangaben
Hauptverfasser: TIAN ZHONGZHENG, FU YUNYI, YU XUEMIN, LI MUCHAN, YU DACHENG, REN LIMING, REN ZHONGYANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a preparation method of a carbon-based device and a circuit structure based on a bromine intercalation multilayer graphene or graphite film, wherein the carbon-based device and the circuit structure have application prospects in the fields of low-power-consumption devices, ultra-dense and ultra-thin integrated circuits and the like. According to the invention, bromine intercalation treatment is carried out on multi-layer graphene or a graphite film, so that the conductivity of the material is improved, wherein a conductive channel is single-layer or double-layer graphene which is thinned after bromine intercalation treatment, bromine is packaged between the single-layer or double-layer graphene and the substrate or between double-layer graphene sheets, and the conductivity of the channel is improved; and the device, the electrode and the local interconnection line are prepared at the same time in the mode of patterning the single graphene or the graphite film so as to greatly reduce th