Static pressure air floatation supporting device with extrusion film assisting in pressure stabilization and control method
The invention discloses a static pressure air floatation supporting device with an extrusion film assisting in pressure stabilization. The static pressure air floatation supporting device comprises an air supply device, a floating body and a carrier, wherein the floating body and the carrier are opp...
Gespeichert in:
Hauptverfasser: | , , , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a static pressure air floatation supporting device with an extrusion film assisting in pressure stabilization. The static pressure air floatation supporting device comprises an air supply device, a floating body and a carrier, wherein the floating body and the carrier are oppositely arranged, and the air supply device introduces air flow between the floating body and the carrier to form a static pressure bearing air film between the floating body and the carrier. The static pressure air floatation supporting device further comprises a high-frequency vibration generator mounted on the carrier, and the high-frequency vibration generator drives the carrier to vibrate at high frequency. According to the static pressure air floatation supporting device, the effect of restraining low-frequency vibration of the static pressure bearing air film can be achieved, it can be further avoided that the floating body generates resonance along with the static pressure bearing air film, and then the sta |
---|