Rear eccentric device for wafer overturning

The invention discloses a rear eccentric device for wafer overturning. The rear eccentric device comprises a supporting seat, a theta shaft fixed to the supporting seat, a lower mechanical arm, an upper mechanical arm and an overturning mechanism, wherein the lower mechanical arm and the upper mecha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FURUCHI MASATOSHI, QU QUANYOU, LIU YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses a rear eccentric device for wafer overturning. The rear eccentric device comprises a supporting seat, a theta shaft fixed to the supporting seat, a lower mechanical arm, an upper mechanical arm and an overturning mechanism, wherein the lower mechanical arm and the upper mechanical arm are located on the theta shaft, the overturning mechanism is fixed to the tail end of the upper mechanical arm, one end of the lower mechanical arm is fixed to the theta shaft, and the other end of the lower mechanical arm is fixed to one end of the upper mechanical arm; the other end of the mechanical upper arm is fixedly connected with the overturning mechanism; the overturning mechanism comprises an overturning base, a motor and an overturning shaft, one end of the overturning shaft is fixedly connected to the front end of the overturning base, the other end of the overturning shaft is fixedly connected with an end effector, the end effector is of a hollow structure, an air channel is formed in the end