Method and device for measuring deformation of high-precision air-floating guide rail in loading state

The invention discloses a method and a device for measuring deformation of a high-precision air-floating guide rail in a loading state. The method comprises the following steps of: placing a reflection optical flat above the working surface of a guide rail and keeping an angle of 45 degrees with the working surface of the guide rail; transmitting an interference laser beam to the working surface of the air-floating guide rail under the loading condition through the reflection optical flat by a wavefront interferometer; reflecting the surface shape error of the working surface of the air-floating guide rail under the loading condition to the receiving end of the wavefront interferometer through the reflection optical flat to obtain the deformation of a single position of the working surface of the air-floating guide rail under the loading condition; and splicing the deformation of the positions to obtain a deformation measurement result of the air-floating guide rail in the whole stroke. According to the inven