Solar cell metal gate jet printing forming method and device for laser in-situ film opening

The invention discloses a solar cell metal gate jet printing forming method and device for laser in-situ film opening. The method comprises the following steps: step 1, performing in-situ film opening on a SiNx film by using a laser technology to form a micro groove; step 2, injecting metal ink into...

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Bibliographische Detailangaben
Hauptverfasser: WANG XIUKUN, LI PENGPENG, ZHANG LEI, JIN ZHONGSHANG, LIU LI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a solar cell metal gate jet printing forming method and device for laser in-situ film opening. The method comprises the following steps: step 1, performing in-situ film opening on a SiNx film by using a laser technology to form a micro groove; step 2, injecting metal ink into the micro groove through the ink-jet printing technology; and step 3, adjusting parameters of laser power, defocusing amount, scanning frequency and scanning speed so as to determine a quantitative relation with the film micro groove, thereby realizing optimization and accurate control of the film micro groove, ensuring that the metal ink is accurately injected into the micro groove, and heating to form a solar cell metal gate. A substrate is subjected to laser in-situ film opening in advance before ink-jet printing, so that the requirements of ultra-fine and large height-width ratio of a solar cell grid line electrode are met, the complex process of adding glass powder into metal ink to be sprayed is avoided, the