Array substrate, array substrate preparation method and display panel

The invention discloses an array substrate, an array substrate preparation method and a display panel, the array substrate preparation method comprises the following steps: depositing an inorganic film on a non-opening area of a first surface of the substrate, The first surface is a surface, facing...

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Bibliographische Detailangaben
Hauptverfasser: ZHENG ZAIWEN, YUAN HAIJIANG, WU KERONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an array substrate, an array substrate preparation method and a display panel, the array substrate preparation method comprises the following steps: depositing an inorganic film on a non-opening area of a first surface of the substrate, The first surface is a surface, facing away from the substrate, of the substrate, and the inorganic film is an inorganic film or a silicon nitride film; forming a pixel definition layer on the inorganic thin film, and removing the pixel definition layer at the via hole region in the non-opening region; etching the inorganic thin film at the via hole area through a wet etching process, so that the inorganic thin film generates a lateral erosion phenomenon at the edge of the pixel definition layer; evaporating an organic light emitting diode layer; and after the organic light-emitting diode layer is formed through evaporation, evaporating the cathode of the array substrate. The cathode of the organic light-emitting diode is in contact with the auxiliary e