Method for confirming corrosion process through size of back side unit cell

The invention provides a method for confirming a corrosion process through the size of a back side unit cell, which comprises the following steps of 1, measuring the size of the unit cell on the back side of a silicon wafer by adopting a microscope, selecting at least five unit cell measuring points on the same silicon wafer, averaging, and taking the average value as the size of the unit cell, and 2, determining an acid corrosion removal amount and an alkali corrosion removal amount in the corrosion process according to the average value, wherein the larger the unit cell size is, the larger the alkali corrosion amount is, and the smaller the acid corrosion amount is. The invention provides a method for confirming the corrosion process, the size of the unit cell of the silicon wafer has a great relationship with the corrosion process, and the patent finds another way, and finds the relationship with the size of the unit cell after corrosion under different corrosion process conditions by exploring the mixed c