Solar cell gentle slope structure and manufacturing method thereof

The invention aims to disclose a solar cell gentle slope structure and a manufacturing method thereof, a plurality of material layers (a first material layer, a second material layer, a third material layer, a fourth material layer and a fourth material layer) are arranged on a substrate, and light...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU ZHEYAO, TANG ANDI, WANG WEILIAN, ZHOU KAIRU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention aims to disclose a solar cell gentle slope structure and a manufacturing method thereof, a plurality of material layers (a first material layer, a second material layer, a third material layer, a fourth material layer and a fourth material layer) are arranged on a substrate, and light resistance can be effectively removed in the steps of light resistance exposure, development and removal according to a surface step layer structure formed by the material layers. Metal residues caused by over-thick or over-high light resistance of part of the metal layer needing to be etched are avoided. 本发明旨在揭露一种太阳能电池缓坡结构及其制造方法,其于一基板上设置复数材料层(第一材料层至第四材料层),依据该些材料层所形成的表面阶梯层结构,于进行光阻曝光、显影、去除的步骤时能够有效去除光阻,而避免部分需要蚀刻的金属层因光阻过厚或过高导致金属残留。