SUSCEPTOR WITH SIDEWALL HUMPS FOR UNIFORM DEPOSITION

The present disclosure relates to a susceptor having a generally circular body having a face with a radially inward section and a radially outward section which includes a substrate supporting surface elevated relative to the radially inward section. A sidewall surrounds the substrate supporting surface which upon retention of a substrate on the radially outward section, the sidewall surrounds the substrate. The sidewall includes a plurality of humps which protrude from the top surface of the sidewall. Advantageously, the plurality of humps may aid in even thickness of deposition of material at the edge of the substrate. 本公开涉及一种衬托器，所述衬托器具有带有面的大体上圆形本体，所述本体具有径向向内区段和径向向外区段，所述径向向外区段包括相对于径向向内区段升高的衬底支承表面。侧壁围绕衬底支承表面，所述衬底支承表面在将衬底保持在径向向外区段上时，侧壁围绕衬底。侧壁包括从侧壁的顶表面突出的多个隆起。有利地，多个隆起可以有助于在衬底的边缘处材料的沉积厚度均匀。