Processing method and device for reducing optical waveguide loss

The invention provides a processing method and device for reducing optical waveguide loss. The processing method comprises the following steps: sequentially carrying out heating stage, constant temperature stage and cooling stage treatment on a scribed chip, wherein in the heating stage, the temperature is raised to 200-250 DEG C at a preset heating rate; in the constant temperature stage, the temperature is kept at 200-250 DEG C for a certain time; and the cooling stage is that the temperature is reduced to 50 +/-5 DEG C at a preset cooling rate. According to the processing method for reducing the loss of the optical waveguide, the stress problem caused by scribing is eliminated or reduced by baking the photon chip for a constant time at a low temperature, the transmission loss of the optical waveguide is directly and quickly reduced, meanwhile, damage of high temperature to devices on the photon chip is avoided through low-temperature baking, and the processing method is simple and easy to implement. 本发明提供了