AQUEOUS ALKALINE PRE-TREATMENT SOLUTION FOR USE PRIOR TO DEPOSITION OF PALLADIUM ACTIVATION LAYER, METHOD AND USE THEREOF

The invention relates to an aqueous alkaline pre-treatment solution for use prior to deposition of a palladium activation layer on a substrate in manufacturing an article with an integrated circuit and a method and use thereof, wherein the solution comprises: - at least one hydroxycarboxylic acid or salt thereof according to the general formula (I) [RCH2-(RCH)n-COO-]m Mm+ (I) wherein n is integer from 2 to 4 and m is 1 or 2, R is independently H or OH with proviso that at least one R is OH, and wherein Mm+ with m: 1 is hydrogen, ammonium or alkali metal; or Mm+ with m: 2 is earth alkali metal, - at least one polyoxyethylene sorbitan fatty acid ester, - at least one sulphonated fatty acid or a salt thereof. 本发明涉及在制造具有集成电路的物件中用于在钯活化层沉积于衬底上之前使用的水性碱性预处理溶液及其方法和用途，其中所述溶液包含：-至少一种通式(I)的羟基羧酸或其盐：[RCH2-(RCH)n-COO-]mMm+(I)，其中n是2到4的整数且m是1或2，R独立地为H或OH，限制条件是至少一个R是OH，并且其中m为1的Mm+是氢、铵或碱金属；或m为2的Mm+是碱土金属；-至少一种聚氧乙烯山梨糖醇酐脂肪酸酯；-至少一种磺化脂肪酸或其盐。[RCH2-(RCH)n-COO-]mMm+(I)。