PECVD coating method of efficient heterojunction solar cell

The invention relates to a PECVD coating method of an efficient heterojunction solar cell. The PECVD coating method comprises a gradient I layer deposition method. According to the gradient type I layer deposition method, a PECVD method is used for decomposing reaction gas to conduct intrinsic I type amorphous silicon deposition, the hydrogen content in the reaction gas is gradually increased, and the intrinsic I type amorphous silicon deposition rate is gradually reduced. According to the PECVD coating method for the efficient heterojunction solar cell provided by the invention, the passivation effect can be improved, and the performance of an intrinsic I-type amorphous silicon film can be optimized to the greatest extent. 本发明涉及一种高效异质结太阳能电池的PECVD镀膜方法，它包括渐变式沉积I层方法；所述渐变式沉积I层方法为，利用PECVD方法分解反应气体进行本征I型非晶硅沉积，反应气体中氢气含量逐渐增加，本征I型非晶硅沉积速率逐渐降低。本发明的目的在于提供一种高效异质结太阳能电池的PECVD镀膜方法，其能够提升钝化效果，本征I型非晶硅薄膜性能得到最大优化。