MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME

A method for operating a multi-beam particle beam system is disclosed. The method comprises generating a multiplicity of particle beams in such a way that they each pass through multi-pole elements which are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multi-pole elements; exciting the deflection elements of the multi-pole elements that are intact using the determined excitations; and modifying the determined excitations for the deflection elements of the multi-pole elements that are defective, and exciting the deflection elements of the defective multi-pole elements using the modified excitations; wherein the modification comprises adding correction excitations to the determined excitations, and the correction excitations are the same for all deflection elements of the defective multi-pole element. 披露了一种用于操作多束式粒子束系统的方法，该方法包括：生成多个粒子束，使得它们各自穿过完好的或有缺陷的多极元件；将这些粒子束聚焦在预定平面中；确定用于这些多极元件的偏转元件的激励；使用所确定的激励来激励完好的这些多极元件的偏转元件；以