Pulsed light detector and preparation method thereof

The invention discloses a pulsed light detector and a preparation method thereof. The detector comprises a substrate, a supporting layer, a piezoelectric film, an electrode and a photoacoustic film. The pulse light detector is based on the photoacoustic effect and the piezoelectric effect, not only...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN CHENGZHANG, ZHANG QINGYUE, WANG XIA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a pulsed light detector and a preparation method thereof. The detector comprises a substrate, a supporting layer, a piezoelectric film, an electrode and a photoacoustic film. The pulse light detector is based on the photoacoustic effect and the piezoelectric effect, not only can rapidly and accurately measure the energy of wide-spectrum pulse light, but also has the advantages of being simple in structure, high in detection sensitivity and the like. 本发明公开了一种脉冲光探测器及其制备方法,所述的探测器包括衬底、支撑层、压电薄膜、电极和光声薄膜。本发明的脉冲光探测器基于光声效应和压电效应,不仅可以对宽光谱脉冲光的能量进行快速准确地测量,还具有结构简单、探测灵敏度高等优点。