Internal matching capacitor of power amplifier

The invention discloses an internal matching capacitor of a power amplifier. The internal matching capacitor comprises a first metal layer, a thin film dielectric layer, a second metal layer, a substrate layer and a third metal layer which are sequentially stacked, wherein a plurality of through holes are formed in the substrate layer, and a metal electroplating layer is arranged on the inner wall of each through hole; and the second metal layer and the third metal layer are connected through the metal electroplated layer. According to the embodiment of the invention, the series parasitic resistance of the capacitor can be reduced, and the quality coefficient of the capacitor is improved. 本发明公开了一种功率放大器的内匹配电容，包括依次层叠设置的第一金属层、薄膜介质层、第二金属层、衬底层以及第三金属层；所述衬底层内设置有若干通孔，且每一所述通孔的内壁上设置有金属电镀层；所述金属电镀层将所述第二金属层和所述第三金属层连接。通过实施本发明实施例能够降低电容的串联寄生电阻，提高电容的品质系数。