Residual gas recovery method of high-purity inorganic compound dichlorosilane subpackage storage container

The invention discloses a residual gas recovery method of a high-purity inorganic compound dichlorosilane (SiH2Cl2) subpackage storage container. The method comprises the steps that airtightness testing is carried out after connection with a recovery pipeline, a steel cylinder is filled with stabilizing gas which cannot react with dichlorosilane by using a residual gas recovery device, dichlorosilane is discharged to the residual gas recovery device to be subjected to recovery by means of the pressure difference, after the steel cylinder is filled with stabilizing gas again to form positive pressure, a valve port of the steel cylinder is closed, the recovery pipeline forms gas-liquid two-phase contact in a washing tower form to absorb harmful gas, and it is confirmed that the recovery pipeline is disassembled in a safe state. Effective residual gas recovery is formed through the pressure difference, airtightness testing is carried out before residual gas recovery operation, residual harmful gas is removed aft