SEMICONDUCTOR STRUCTURE

A semiconductor structure is provided. The semiconductor structure includes a metallization structure, a plurality of conductive pads, and a dielectric layer. The plurality of conductive pads are over the metallization structure. The dielectric layer is on the metallization structure and covers the...

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Bibliographische Detailangaben
Hauptverfasser: EUGENE IUN CHEN, CAI ZIZHONG, WU QIMING, CAI ZHENGYUAN, LIN JIAHUA, ZHANG YAOWEN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A semiconductor structure is provided. The semiconductor structure includes a metallization structure, a plurality of conductive pads, and a dielectric layer. The plurality of conductive pads are over the metallization structure. The dielectric layer is on the metallization structure and covers the conductive pad. The dielectric layer includes a first dielectric film, a second dielectric film, and a third dielectric film. The first dielectric film is on the conductive pad. The second dielectric film is on the first dielectric film. The third dielectric film is on the second dielectric film. The refractive index of the first dielectric film is smaller than the refractive index of the second dielectric film, and the refractive index of the second dielectric film is smaller than a refractive index of the third dielectric film. 本发明实施例涉及一种半导体结构。所述半导体结构包含金属化结构、多个导电垫及电介质层。所述多个导电垫在所述金属化结构上方。所述电介质层在所述金属化结构上且覆盖所述导电垫。所述电介质层包含第一电介质膜、第二电介质膜及第三电介质膜。所述第一电介质膜在所述导电垫上。所述第二电介质膜在所述第一电介质膜上。所述第三电介质膜在所述第二电介质膜上。所述第一电介质膜的折射率小于所述第二电介质