Preparation method and preparation device of solar cell, and solar cell
The invention provides a preparation method and a preparation device of a solar cell, and the solar cell. The preparation method comprises the following steps: providing a lightly doped silicon wafer, wherein the lightly doped silicon wafer comprises a plurality of first preset areas to be subjected...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a preparation method and a preparation device of a solar cell, and the solar cell. The preparation method comprises the following steps: providing a lightly doped silicon wafer, wherein the lightly doped silicon wafer comprises a plurality of first preset areas to be subjected to laser heavy doping; acquiring sheet resistance value distribution of the lightly doped silicon wafer; determining laser heavy doping power of the plurality of first preset areas according to the square resistance value distribution; and performing laser heavy doping on the plurality of first preset areas according to the laser heavy doping power, so that the difference of the sheet resistance values of any two first preset areas after laser processing meets a preset range. According to the preparation method of the solar cell, appropriate laser heavy doping power can be matched for the to-be-heavily-doped areas respectively, so that the sheet resistance consistency of the heavily-doped areas is guaranteed, and |
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