Preparation device and preparation method of electronic grade tetraethoxysilane

The invention provides a preparation device and a preparation method of electronic grade tetraethoxysilane. The preparation device comprises an industrial-grade tetraethoxysilane supply unit, a multi-stage microporous membrane coupling adsorption column, a light component removal rectifying tower and a heavy component removal rectifying tower. The multi-stage microporous membrane coupling adsorption column comprises a columnar hollow shell, the columnar hollow shell is filled with chelating adsorption resin, and microporous membranes are arranged at the two ends of the hollow shell; all stages of microporous membrane coupling adsorption columns are arranged in series and/or in parallel according to a material flowing sequence, and an inlet of the microporous membrane coupling adsorption column positioned at the first stage is connected with an industrial-grade tetraethoxysilane supply unit. According to the method, the microporous membrane and the liquid phase adsorption coupling process are applied to prepar