Sweep-frequency power supply, control method of output power of sweep-frequency power supply, and semiconductor process equipment
The invention provides a frequency-sweep power supply, an output power control method of the output power of the sweep-frequency power supply, and semiconductor process equipment, wherein the frequency-sweep power supply is used for outputting a frequency-adjustable radio frequency signal. The contr...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides a frequency-sweep power supply, an output power control method of the output power of the sweep-frequency power supply, and semiconductor process equipment, wherein the frequency-sweep power supply is used for outputting a frequency-adjustable radio frequency signal. The control method of the frequency-sweep power supply comprises the following steps: obtaining a set value of the output frequency of the frequency-sweep power supply and a set value of the control voltage of the frequency-sweep power supply, wherein the control voltage is used for controlling the output power of the sweep-frequency power supply; determining a set value of output power corresponding to the set value of the control voltage; determining a first calibration coefficient corresponding to the set value of the output power and the set value of the output frequency according to the set value of the output power, the set value of the output frequency and a pre-established mapping relation table; and calibrating the |
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