Multi-element hard film and preparation process thereof

The invention belongs to the technical field of hard film products, and particularly relates to a multi-element hard film and a preparation process thereof. The preparation process of the multi-element hard film comprises the following specific steps of selecting a stainless steel substrate, carryin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PAN ZHENQIANG, SHI HUAFENG, ZHU HUIQIN, PAN YOUMING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of hard film products, and particularly relates to a multi-element hard film and a preparation process thereof. The preparation process of the multi-element hard film comprises the following specific steps of selecting a stainless steel substrate, carrying out bombardment treatment on the surface of the stainless steel substrate, sputtering and depositing a first film layer Cr layer, sputtering to generate a second film layer CrN layer, sputtering to generate a third film layer CrSiN layer, and sputtering to generate a fourth film layer CrSiCN layer. According to the preparation process of the multi-element hard film, magnetron sputtering and a plasma-assisted chemical vapor deposition process are effectively combined, so that the binding force and the performance of the hard film are greatly improved; besides, the prepared hard film is of a Cr/CrN/CrSiN/CrSiCN multi-element structure, an organic silicon precursor with a certain saturated vapor pressure is adopted