Multichannel testing device applied to probe station

The invention relates to a multichannel testing device applied to a probe station. The device comprises a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a wo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TIAN TENGTENG, LIU WEI, LYU WENBO, ZHANG HAIYANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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