Multichannel testing device applied to probe station

Multichannel testing device applied to probe station

The invention relates to a multichannel testing device applied to a probe station. The device comprises a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a wo...

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Hauptverfasser: TIAN TENGTENG, LIU WEI, LYU WENBO, ZHANG HAIYANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator TIAN TENGTENG
LIU WEI
LYU WENBO
ZHANG HAIYANG
description The invention relates to a multichannel testing device applied to a probe station. The device comprises a working table, a microscope displacement table is arranged on the table top of the working table, and a probe card overturning displacement table and a wafer chuck mechanism are arranged in a working cavity in the working table; the microscope displacement table comprises a three-axis displacement assembly, and a microscope mechanism is arranged at the front end of the three-axis displacement assembly; the probe card overturning displacement table comprises a probe card Y-axis displacement assembly and a plurality of probe card X-axis displacement assemblies; the plurality of probe card X-axis displacement assemblies are arranged on the probe card Y-axis displacement assembly in a sliding manner through a probe card overturning mechanism; a plurality of probe card mechanisms are arranged on the plurality of probe card X-axis displacement assemblies in a sliding manner, and each probe card mechanism compri
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Multichannel testing device applied to probe station
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