Liquid nitrogen environment loading device and liquid nitrogen manual probe station applied to wafer testing
The invention relates to the technical field of integrated circuit testing, in particular to a liquid nitrogen environment loading device and a liquid nitrogen manual probe station applied to wafer testing. The device comprises a vacuum heat preservation layer, a heat preservation cover is arranged...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of integrated circuit testing, in particular to a liquid nitrogen environment loading device and a liquid nitrogen manual probe station applied to wafer testing. The device comprises a vacuum heat preservation layer, a heat preservation cover is arranged at the upper end of the vacuum heat preservation layer, a heat preservation cavity is formed by the heat preservation cover and the inner side of the vacuum heat preservation layer, and the outer side and the bottom of the vacuum heat preservation layer are wrapped with protective layers; an objective table is arranged in the heat preservation cavity; the upper surface of the objective table is provided with a wafer fixing piece used for positioning and fixing a wafer, and the periphery of the objective table is provided with a plurality of sensor holes used for installing sensors. A liquid injection opening is formed in the heat preservation cover and covered with an upper cover plate, the outer side and the botto |
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