FILM FORMING APPARATUS AND METHOD

The invention provides a film forming apparatus and method. The film forming apparatus includes: a target holder that holds a target on a front surface such that the target faces a substrate and extends in a predetermined direction within a horizontal plane; a magnet unit provided on the back surfac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HIRASAWA TATSURO, IWASHITA HIROYUKI, ISHIBASHI SHOTA, HIROYUKI TOSHIMA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention provides a film forming apparatus and method. The film forming apparatus includes: a target holder that holds a target on a front surface such that the target faces a substrate and extends in a predetermined direction within a horizontal plane; a magnet unit provided on the back surface side of the target holder, the magnet unit having a magnet array formed by arranging magnets; a pair of shield members provided between the target held by the target holder and the substrate so as to extend from the target toward the substrate; and a moving mechanism that moves the magnet unit so as to reciprocate between one end and the other end of the target held by the target holder in a predetermined direction. The magnet units are provided in a pair in such a manner that the magnet array bodies are arranged side by side in a predetermined direction. Each of the shielding members is provided on a boundary line between a first region through which only one of the pair of magnet arrays passes during the recipr