Grinding control method of chemical mechanical grinding process

The invention discloses a grinding control method of a chemical mechanical grinding process. An iAPC is adopted for grinding control, and control parameters of the iAPC comprise a simulated grinding rate and the service time of consumables. The grinding control method comprises the steps that a firs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XIA HUIZHE, LI SONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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