Anti-reflection film system containing magnesium fluoride film layer, and preparation method thereof

The invention provides an anti-reflection film system containing a magnesium fluoride film layer, and a preparation method thereof. The anti-reflection film system containing the magnesium fluoride film layer comprises: a substrate layer; a plurality of first film layers; a plurality of second film...

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Bibliographische Detailangaben
Hauptverfasser: YUAN YINCHAO, KUAI ZEWEN, RUAN GAOLIANG, ZHANG LIXUN, DONG CHANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides an anti-reflection film system containing a magnesium fluoride film layer, and a preparation method thereof. The anti-reflection film system containing the magnesium fluoride film layer comprises: a substrate layer; a plurality of first film layers; a plurality of second film layers, wherein the refractive index of the first film layers is larger than that of the second film layers, at least one second film layer in the plurality of first film layers and the plurality of second film layers is alternately stacked to form a transition layer, the transition layer is connected with the substrate layer, and the first film layers are arranged on the side, away from the substrate layer, of the transition layer; and a magnesium fluoride film layer connected to the side, away from the substrate layer, of the transition layer, wherein the surface of the side, away from the transition layer, of the magnesium fluoride film layer is connected with at least another second film layer in the plurality