ROBOT HAND AND ROBOT EQUIPPED WITH SAME
Provided is a robot hand for holding a substrate by abutting on at least two locations on the edge of the substrate. The robot hand is provided with: a base body having a holding position defined so that the center of the substrate is positioned on a center line extending in the length direction; an...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Provided is a robot hand for holding a substrate by abutting on at least two locations on the edge of the substrate. The robot hand is provided with: a base body having a holding position defined so that the center of the substrate is positioned on a center line extending in the length direction; and a rotating portion which is rotatable, about a supported point located on the proximal end side of a second abutment portion on the center line, integrally with the second abutment portion on a plane in which the length direction and the thickness direction intersect with each other, and which is movable integrally with the second abutment portion. The robot hand is characterized in that, when holding the substrate, the second abutment portion is subjected to a reactive force from the substrate, whereby the rotating portion and the second abutment portion integrally rotate about the supported point toward the base body on the plane in which the length direction and the thickness direction intersect with each othe |
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