Objective lens wave aberration detection device and detection method

Objective lens wave aberration detection device and detection method

The invention discloses an objective lens wave aberration detection device and method. The objective lens wave aberration detection device comprises a wavefront detection system, a plane mirror and a plane mirror adjusting mechanism, and a detected objective lens is arranged between the plane mirror...

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Hauptverfasser: LU YUNJUN, LI PENG, WEI XIANGYU, TANG FENG, WANG XIANGCHAO, LIU YANG, CAO YISHA, PENG CHANGZHE
Format: Patent
Sprache:chi ; eng
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MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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creator LU YUNJUN
LI PENG
WEI XIANGYU
TANG FENG
WANG XIANGCHAO
LIU YANG
CAO YISHA
PENG CHANGZHE
description The invention discloses an objective lens wave aberration detection device and method. The objective lens wave aberration detection device comprises a wavefront detection system, a plane mirror and a plane mirror adjusting mechanism, and a detected objective lens is arranged between the plane mirror and wavefront detection equipment; the plane mirror is arranged at the focus of the measured objective lens. Test wavefronts emitted by the wavefront detection system pass through the detected objective lens, are reflected by the plane mirror, then pass through the detected objective lens again, are received by the wavefront detection system and are detected to obtain phase distribution, the inclination state of the plane mirror is adjusted to obtain different return wavefronts, a polynomial for expressing wave aberration is selected, and an expression corresponding to each return wavefront is calculated, so that a fitting result of the wave aberration of the objective lens to be measured expressed by the selected
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subjects MEASURING
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
title Objective lens wave aberration detection device and detection method
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