Objective lens wave aberration detection device and detection method
The invention discloses an objective lens wave aberration detection device and method. The objective lens wave aberration detection device comprises a wavefront detection system, a plane mirror and a plane mirror adjusting mechanism, and a detected objective lens is arranged between the plane mirror...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an objective lens wave aberration detection device and method. The objective lens wave aberration detection device comprises a wavefront detection system, a plane mirror and a plane mirror adjusting mechanism, and a detected objective lens is arranged between the plane mirror and wavefront detection equipment; the plane mirror is arranged at the focus of the measured objective lens. Test wavefronts emitted by the wavefront detection system pass through the detected objective lens, are reflected by the plane mirror, then pass through the detected objective lens again, are received by the wavefront detection system and are detected to obtain phase distribution, the inclination state of the plane mirror is adjusted to obtain different return wavefronts, a polynomial for expressing wave aberration is selected, and an expression corresponding to each return wavefront is calculated, so that a fitting result of the wave aberration of the objective lens to be measured expressed by the selected |
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